即溫(wen)度(du)傳(chuan)感(gan)(gan)器(qi)(qi)的(de)(de)(de)(de)(de)輸(shu)出(chu)(chu)導線與鋁(lv)層(ceng)(ceng)(ceng)(ceng)連接以通(tong)過鋁(lv)層(ceng)(ceng)(ceng)(ceng)與金(jin)屬鉑(bo)層(ceng)(ceng)(ceng)(ceng)連接。上述(shu)鉑(bo)熱電阻(zu)傳(chuan)感(gan)(gan)器(qi)(qi)，利(li)用(yong)金(jin)屬鉑(bo)在(zai)(zai)(zai)(zai)溫(wen)度(du)變化(hua)(hua)時(shi)自身電阻(zu)值也會隨著(zhu)溫(wen)度(du)改變的(de)(de)(de)(de)(de)特性來測量(liang)溫(wen)度(du)，溫(wen)度(du)傳(chuan)感(gan)(gan)器(qi)(qi)的(de)(de)(de)(de)(de)輸(shu)出(chu)(chu)端(duan)子(zi)與顯示(shi)儀表(biao)連接，顯示(shi)儀表(biao)會顯示(shi)受溫(wen)度(du)影響得(de)到的(de)(de)(de)(de)(de)鉑(bo)電阻(zu)對(dui)應的(de)(de)(de)(de)(de)溫(wen)度(du)值。在(zai)(zai)(zai)(zai)一實施(shi)(shi)例中，因上述(shu)熱電阻(zu)傳(chuan)感(gan)(gan)器(qi)(qi)中上層(ceng)(ceng)(ceng)(ceng)有(you)金(jin)屬結(jie)構(gou)(gou)如金(jin)屬鋁(lv)和(he)(he)金(jin)屬鉑(bo)，對(dui)于直(zhi)接暴(bao)露在(zai)(zai)(zai)(zai)空氣中時(shi)容易氧(yang)化(hua)(hua)的(de)(de)(de)(de)(de)金(jin)屬層(ceng)(ceng)(ceng)(ceng)，其上還形(xing)成有(you)一層(ceng)(ceng)(ceng)(ceng)鈍化(hua)(hua)層(ceng)(ceng)(ceng)(ceng)，可(ke)(ke)對(dui)金(jin)屬層(ceng)(ceng)(ceng)(ceng)進行保護(hu)。同時(shi)，需要在(zai)(zai)(zai)(zai)對(dui)應溫(wen)度(du)傳(chuan)感(gan)(gan)器(qi)(qi)引(yin)出(chu)(chu)端(duan)子(zi)處開(kai)設(she)(she)有(you)通(tong)孔，通(tong)過通(tong)孔可(ke)(ke)引(yin)出(chu)(chu)輸(shu)出(chu)(chu)端(duan)子(zi)。在(zai)(zai)(zai)(zai)本實施(shi)(shi)例中，是在(zai)(zai)(zai)(zai)兩(liang)端(duan)的(de)(de)(de)(de)(de)金(jin)屬鋁(lv)上方的(de)(de)(de)(de)(de)鈍化(hua)(hua)層(ceng)(ceng)(ceng)(ceng)開(kai)設(she)(she)有(you)通(tong)孔。鈍化(hua)(hua)層(ceng)(ceng)(ceng)(ceng)可(ke)(ke)為氧(yang)化(hua)(hua)硅(gui)(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)或氮化(hua)(hua)硅(gui)(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)，也可(ke)(ke)為疊設(she)(she)的(de)(de)(de)(de)(de)氧(yang)化(hua)(hua)硅(gui)(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)和(he)(he)氮化(hua)(hua)硅(gui)(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)。在(zai)(zai)(zai)(zai)一實施(shi)(shi)例中，測溫(wen)單元(yuan)為一熱電偶傳(chuan)感(gan)(gan)結(jie)構(gou)(gou)，包(bao)括：多(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)，包(bao)括并(bing)排且間隔設(she)(she)置(zhi)的(de)(de)(de)(de)(de)n型(xing)多(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)條(tiao)(tiao)(tiao)和(he)(he)p型(xing)多(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)條(tiao)(tiao)(tiao)；和(he)(he)第(di)(di)三金(jin)屬層(ceng)(ceng)(ceng)(ceng)。第(di)(di)三金(jin)屬層(ceng)(ceng)(ceng)(ceng)包(bao)括位于相鄰多(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)條(tiao)(tiao)(tiao)之間的(de)(de)(de)(de)(de)金(jin)屬結(jie)構(gou)(gou)，n型(xing)多(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)和(he)(he)p型(xing)多(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)通(tong)過金(jin)屬結(jie)構(gou)(gou)串(chuan)聯，第(di)(di)三金(jin)屬層(ceng)(ceng)(ceng)(ceng)還包(bao)括位于多(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)外(wai)側兩(liang)端(duan)的(de)(de)(de)(de)(de)第(di)(di)二金(jin)屬結(jie)構(gou)(gou)，用(yong)于引(yin)出(chu)(chu)溫(wen)度(du)傳(chuan)感(gan)(gan)器(qi)(qi)的(de)(de)(de)(de)(de)輸(shu)出(chu)(chu)端(duan)子(zi)。如圖和(he)(he)圖所示(shi)，氧(yang)化(hua)(hua)硅(gui)(gui)(gui)(gui)(gui)薄膜上形(xing)成有(you)一層(ceng)(ceng)(ceng)(ceng)多(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)。該(gai)多(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)包(bao)括并(bing)排且間隔設(she)(she)置(zhi)的(de)(de)(de)(de)(de)n型(xing)多(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)條(tiao)(tiao)(tiao)和(he)(he)p型(xing)多(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)條(tiao)(tiao)(tiao)。溫(wen)度(du)傳(chuan)感(gan)(gan)器(qi)(qi)哪家服務好？認準深圳(zhen)市美(mei)信美(mei)科技(ji)有(you)限公司。武漢(han)紅外(wai) 溫(wen)度(du)傳(chuan)感(gan)(gan)器(qi)(qi)工藝(yi)

p型(xing)(xing)多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)可為在(zai)多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)內(nei)部摻雜ⅲ族(zu)元素形(xing)成導電(dian)類型(xing)(xing)為p型(xing)(xing)的(de)(de)多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)，且其(qi)內(nei)部摻雜均勻。n型(xing)(xing)多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)條(tiao)(tiao)(tiao)(tiao)(tiao)(tiao)和(he)p型(xing)(xing)多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)條(tiao)(tiao)(tiao)(tiao)(tiao)(tiao)形(xing)狀(zhuang)相(xiang)(xiang)(xiang)(xiang)同(tong)，在(zai)本(ben)方案中，n型(xing)(xing)多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)條(tiao)(tiao)(tiao)(tiao)(tiao)(tiao)和(he)p型(xing)(xing)多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)條(tiao)(tiao)(tiao)(tiao)(tiao)(tiao)為長條(tiao)(tiao)(tiao)(tiao)(tiao)(tiao)型(xing)(xing)，多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)條(tiao)(tiao)(tiao)(tiao)(tiao)(tiao)平(ping)行(xing)設(she)置，具有(you)相(xiang)(xiang)(xiang)(xiang)同(tong)的(de)(de)間(jian)距。步驟s135：在(zai)多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)層上(shang)淀(dian)積(ji)第(di)(di)(di)(di)三金(jin)(jin)屬(shu)(shu)(shu)層，第(di)(di)(di)(di)三金(jin)(jin)屬(shu)(shu)(shu)層包括(kuo)位(wei)于(yu)(yu)相(xiang)(xiang)(xiang)(xiang)鄰多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)條(tiao)(tiao)(tiao)(tiao)(tiao)(tiao)之(zhi)間(jian)的(de)(de)金(jin)(jin)屬(shu)(shu)(shu)結(jie)(jie)(jie)構(gou)(gou)，n型(xing)(xing)多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)條(tiao)(tiao)(tiao)(tiao)(tiao)(tiao)和(he)p型(xing)(xing)多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)條(tiao)(tiao)(tiao)(tiao)(tiao)(tiao)通(tong)過金(jin)(jin)屬(shu)(shu)(shu)結(jie)(jie)(jie)構(gou)(gou)串(chuan)(chuan)聯(lian)，第(di)(di)(di)(di)三金(jin)(jin)屬(shu)(shu)(shu)層還包括(kuo)位(wei)于(yu)(yu)多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)層外側兩端的(de)(de)第(di)(di)(di)(di)二金(jin)(jin)屬(shu)(shu)(shu)結(jie)(jie)(jie)構(gou)(gou)，用于(yu)(yu)引出(chu)溫(wen)(wen)度(du)傳感(gan)器的(de)(de)輸出(chu)端子。繼續(xu)參見圖5和(he)圖6，在(zai)多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)層50上(shang)淀(dian)積(ji)第(di)(di)(di)(di)三金(jin)(jin)屬(shu)(shu)(shu)層60，第(di)(di)(di)(di)三金(jin)(jin)屬(shu)(shu)(shu)層60包括(kuo)金(jin)(jin)屬(shu)(shu)(shu)結(jie)(jie)(jie)構(gou)(gou)61和(he)第(di)(di)(di)(di)二金(jin)(jin)屬(shu)(shu)(shu)結(jie)(jie)(jie)構(gou)(gou)62。金(jin)(jin)屬(shu)(shu)(shu)結(jie)(jie)(jie)構(gou)(gou)61位(wei)于(yu)(yu)相(xiang)(xiang)(xiang)(xiang)鄰多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)條(tiao)(tiao)(tiao)(tiao)(tiao)(tiao)之(zhi)間(jian)以連接該多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)條(tiao)(tiao)(tiao)(tiao)(tiao)(tiao)，具體(ti)為位(wei)于(yu)(yu)相(xiang)(xiang)(xiang)(xiang)鄰多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)條(tiao)(tiao)(tiao)(tiao)(tiao)(tiao)端部位(wei)置，所有(you)n型(xing)(xing)多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)條(tiao)(tiao)(tiao)(tiao)(tiao)(tiao)51和(he)p型(xing)(xing)多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)條(tiao)(tiao)(tiao)(tiao)(tiao)(tiao)52通(tong)過該金(jin)(jin)屬(shu)(shu)(shu)結(jie)(jie)(jie)構(gou)(gou)61形(xing)成一串(chuan)(chuan)聯(lian)結(jie)(jie)(jie)構(gou)(gou)，因此(ci)，當具有(you)m個(ge)多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)條(tiao)(tiao)(tiao)(tiao)(tiao)(tiao)時，需要m-1個(ge)金(jin)(jin)屬(shu)(shu)(shu)結(jie)(jie)(jie)構(gou)(gou)61使多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)條(tiao)(tiao)(tiao)(tiao)(tiao)(tiao)串(chuan)(chuan)聯(lian)起來。一個(ge)n型(xing)(xing)多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)條(tiao)(tiao)(tiao)(tiao)(tiao)(tiao)與一個(ge)p型(xing)(xing)多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)條(tiao)(tiao)(tiao)(tiao)(tiao)(tiao)串(chuan)(chuan)聯(lian)形(xing)成一個(ge)塞貝克(ke)(seebeck)結(jie)(jie)(jie)構(gou)(gou)，在(zai)本(ben)方案中，是多(duo)(duo)(duo)(duo)(duo)(duo)(duo)個(ge)塞貝克(ke)結(jie)(jie)(jie)構(gou)(gou)串(chuan)(chuan)聯(lian)形(xing)成一個(ge)測溫(wen)(wen)單元，因此(ci)，m需為偶(ou)數。第(di)(di)(di)(di)二金(jin)(jin)屬(shu)(shu)(shu)結(jie)(jie)(jie)構(gou)(gou)62淀(dian)積(ji)于(yu)(yu)多(duo)(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)硅(gui)(gui)(gui)(gui)(gui)(gui)層外側的(de)(de)兩端，以便于(yu)(yu)引出(chu)溫(wen)(wen)度(du)傳感(gan)器的(de)(de)輸出(chu)端子。在(zai)本(ben)實施例中，第(di)(di)(di)(di)三金(jin)(jin)屬(shu)(shu)(shu)層60為金(jin)(jin)屬(shu)(shu)(shu)鋁層。上(shang)述熱電(dian)偶(ou)傳感(gan)結(jie)(jie)(jie)構(gou)(gou)，利(li)用半導體(ti)兩端的(de)(de)溫(wen)(wen)度(du)不同(tong)時。上(shang)海(hai)NTC溫(wen)(wen)度(du)傳感(gan)器報價進口的(de)(de)德州(zhou)溫(wen)(wen)度(du)傳感(gan)器，就找深(shen)圳美信(xin)美科技(ji)。

上(shang)(shang)述溫(wen)(wen)(wen)(wen)(wen)(wen)度(du)(du)(du)傳(chuan)感(gan)(gan)器制備方(fang)(fang)(fang)法(fa)，可以得到氧(yang)(yang)化(hua)(hua)(hua)硅(gui)(gui)(gui)薄(bo)(bo)(bo)膜(mo)，且氧(yang)(yang)化(hua)(hua)(hua)硅(gui)(gui)(gui)薄(bo)(bo)(bo)膜(mo)與硅(gui)(gui)(gui)通過(guo)空腔(qiang)(qiang)(qiang)隔離，空腔(qiang)(qiang)(qiang)下方(fang)(fang)(fang)的(de)(de)硅(gui)(gui)(gui)不會影響上(shang)(shang)方(fang)(fang)(fang)氧(yang)(yang)化(hua)(hua)(hua)硅(gui)(gui)(gui)薄(bo)(bo)(bo)膜(mo)的(de)(de)隔離效果(guo)，因此無需(xu)通過(guo)深槽(cao)刻(ke)蝕工藝將多(duo)余的(de)(de)硅(gui)(gui)(gui)刻(ke)蝕掉，簡(jian)化(hua)(hua)(hua)了制備過(guo)程，節(jie)約制備時間(jian)(jian)，節(jie)省(sheng)了制備成(cheng)本。由于(yu)氧(yang)(yang)化(hua)(hua)(hua)硅(gui)(gui)(gui)薄(bo)(bo)(bo)膜(mo)導熱率低，將測(ce)溫(wen)(wen)(wen)(wen)(wen)(wen)單(dan)(dan)(dan)(dan)元(yuan)制備在氧(yang)(yang)化(hua)(hua)(hua)硅(gui)(gui)(gui)薄(bo)(bo)(bo)膜(mo)上(shang)(shang)，具有(you)較好的(de)(de)測(ce)溫(wen)(wen)(wen)(wen)(wen)(wen)效果(guo)，使溫(wen)(wen)(wen)(wen)(wen)(wen)度(du)(du)(du)傳(chuan)感(gan)(gan)器性能更(geng)加穩定(ding)。本發明(ming)還涉及一(yi)種溫(wen)(wen)(wen)(wen)(wen)(wen)度(du)(du)(du)傳(chuan)感(gan)(gan)器，包(bao)括(kuo)：基底(di)，基底(di)包(bao)括(kuo)硅(gui)(gui)(gui)片(pian)和(he)在硅(gui)(gui)(gui)片(pian)上(shang)(shang)形(xing)(xing)成(cheng)的(de)(de)氧(yang)(yang)化(hua)(hua)(hua)硅(gui)(gui)(gui)薄(bo)(bo)(bo)膜(mo)，硅(gui)(gui)(gui)片(pian)和(he)氧(yang)(yang)化(hua)(hua)(hua)硅(gui)(gui)(gui)薄(bo)(bo)(bo)膜(mo)之間(jian)(jian)形(xing)(xing)成(cheng)有(you)空腔(qiang)(qiang)(qiang)；和(he)測(ce)溫(wen)(wen)(wen)(wen)(wen)(wen)單(dan)(dan)(dan)(dan)元(yuan)，測(ce)溫(wen)(wen)(wen)(wen)(wen)(wen)單(dan)(dan)(dan)(dan)元(yuan)形(xing)(xing)成(cheng)于(yu)所述空腔(qiang)(qiang)(qiang)上(shang)(shang)方(fang)(fang)(fang)的(de)(de)氧(yang)(yang)化(hua)(hua)(hua)硅(gui)(gui)(gui)薄(bo)(bo)(bo)膜(mo)上(shang)(shang)，所述測(ce)溫(wen)(wen)(wen)(wen)(wen)(wen)單(dan)(dan)(dan)(dan)元(yuan)用于(yu)感(gan)(gan)測(ce)環境(jing)溫(wen)(wen)(wen)(wen)(wen)(wen)度(du)(du)(du)。如圖(tu)2c所示(shi)，基底(di)包(bao)括(kuo)硅(gui)(gui)(gui)片(pian)20和(he)氧(yang)(yang)化(hua)(hua)(hua)硅(gui)(gui)(gui)薄(bo)(bo)(bo)膜(mo)23，硅(gui)(gui)(gui)片(pian)20和(he)氧(yang)(yang)化(hua)(hua)(hua)硅(gui)(gui)(gui)薄(bo)(bo)(bo)膜(mo)之間(jian)(jian)形(xing)(xing)成(cheng)有(you)空腔(qiang)(qiang)(qiang)22。測(ce)溫(wen)(wen)(wen)(wen)(wen)(wen)單(dan)(dan)(dan)(dan)元(yuan)是溫(wen)(wen)(wen)(wen)(wen)(wen)度(du)(du)(du)傳(chuan)感(gan)(gan)器的(de)(de)工作單(dan)(dan)(dan)(dan)元(yuan)，溫(wen)(wen)(wen)(wen)(wen)(wen)度(du)(du)(du)傳(chuan)感(gan)(gan)器通過(guo)該測(ce)溫(wen)(wen)(wen)(wen)(wen)(wen)單(dan)(dan)(dan)(dan)元(yuan)感(gan)(gan)知溫(wen)(wen)(wen)(wen)(wen)(wen)度(du)(du)(du)后形(xing)(xing)成(cheng)電信號并輸(shu)出，在本方(fang)(fang)(fang)案中(zhong)，測(ce)溫(wen)(wen)(wen)(wen)(wen)(wen)單(dan)(dan)(dan)(dan)元(yuan)形(xing)(xing)成(cheng)于(yu)氧(yang)(yang)化(hua)(hua)(hua)硅(gui)(gui)(gui)薄(bo)(bo)(bo)膜(mo)23上(shang)(shang)且位于(yu)空腔(qiang)(qiang)(qiang)上(shang)(shang)方(fang)(fang)(fang)。在一(yi)實施(shi)例(li)中(zhong)，測(ce)溫(wen)(wen)(wen)(wen)(wen)(wen)單(dan)(dan)(dan)(dan)元(yuan)為(wei)一(yi)熱電阻傳(chuan)感(gan)(gan)結(jie)構(gou)，包(bao)括(kuo)：金(jin)(jin)屬(shu)層(ceng)(ceng)(ceng)，金(jin)(jin)屬(shu)層(ceng)(ceng)(ceng)為(wei)金(jin)(jin)屬(shu)鉑(bo)層(ceng)(ceng)(ceng)，金(jin)(jin)屬(shu)鉑(bo)層(ceng)(ceng)(ceng)呈(cheng)連(lian)續弓字形(xing)(xing)結(jie)構(gou)；和(he)第二金(jin)(jin)屬(shu)層(ceng)(ceng)(ceng)，位于(yu)金(jin)(jin)屬(shu)鉑(bo)層(ceng)(ceng)(ceng)外側兩端，用于(yu)引出溫(wen)(wen)(wen)(wen)(wen)(wen)度(du)(du)(du)傳(chuan)感(gan)(gan)器的(de)(de)輸(shu)出端子。如圖(tu)3和(he)圖(tu)4所示(shi)，氧(yang)(yang)化(hua)(hua)(hua)硅(gui)(gui)(gui)薄(bo)(bo)(bo)膜(mo)23上(shang)(shang)淀積有(you)一(yi)層(ceng)(ceng)(ceng)金(jin)(jin)屬(shu)層(ceng)(ceng)(ceng)30，該金(jin)(jin)屬(shu)層(ceng)(ceng)(ceng)30為(wei)金(jin)(jin)屬(shu)鉑(bo)層(ceng)(ceng)(ceng)，即熱電阻傳(chuan)感(gan)(gan)結(jie)構(gou)選用鉑(bo)熱電阻。

在(zai)一(yi)實施例(li)中。深圳市(shi)美信(xin)(xin)美科(ke)技有(you)限公(gong)司(si)于(yu)2020年(nian)04月(yue)17日成立。公(gong)司(si)經(jing)營范(fan)圍包(bao)括(kuo)：一(yi)般經(jing)營項(xiang)目是：電(dian)子(zi)產品(pin)及(ji)其配件的(de)技術開(kai)發與(yu)(yu)銷(xiao)售；國(guo)內貿(mao)易(yi)(yi)等。本公(gong)司(si)主營推廣(guang)銷(xiao)售AD（亞德諾）,LINEAR（凌特）以(yi)及(ji)TI、MAXIM、NXP等國(guo)際品(pin)牌集成電(dian)路。產品(pin)廣(guang)泛應用于(yu)：汽車(che)、通(tong)信(xin)(xin)、消費電(dian)子(zi)、工業控制、醫(yi)療器(qi)械、儀(yi)器(qi)儀(yi)表、安防監控等領域。本公(gong)司(si)一(yi)直(zhi)秉承優(you)勢(shi)服務(wu)，誠(cheng)信(xin)(xin)合作(zuo)的(de)原則。以(yi)現代化(hua)管理以(yi)及(ji)優(you)勢(shi)的(de)渠(qu)道價(jia)格、良好的(de)信(xin)(xin)譽與(yu)(yu)廣(guang)大客(ke)戶建(jian)立了長期友好的(de)合作(zuo)關(guan)系(xi)，為(wei)廣(guang)大廠商和(he)市(shi)場客(ke)戶提供優(you)勢(shi)的(de)產品(pin)服務(wu)。可以(yi)將(jiang)溫(wen)(wen)度(du)傳(chuan)(chuan)感(gan)(gan)器(qi)兩(liang)輸出端(duan)(duan)子(zi)作(zuo)為(wei)冷端(duan)(duan)且保持(chi)冷端(duan)(duan)溫(wen)(wen)度(du)恒定，將(jiang)串(chuan)聯的(de)多晶硅層(ceng)(ceng)(ceng)作(zuo)為(wei)熱端(duan)(duan)感(gan)(gan)測實際環境(jing)(jing)溫(wen)(wen)度(du)，當環境(jing)(jing)溫(wen)(wen)度(du)發生變(bian)化(hua)時(shi)，冷端(duan)(duan)和(he)熱端(duan)(duan)的(de)溫(wen)(wen)差發生變(bian)化(hua)，因此冷端(duan)(duan)的(de)電(dian)勢(shi)會發生變(bian)化(hua)，與(yu)(yu)顯(xian)(xian)示儀(yi)表連(lian)接后(hou)，顯(xian)(xian)示儀(yi)表會顯(xian)(xian)示熱電(dian)偶受當前(qian)環境(jing)(jing)溫(wen)(wen)度(du)影(ying)響(xiang)得到的(de)電(dian)勢(shi)所對應的(de)熱端(duan)(duan)溫(wen)(wen)度(du)，即當前(qian)環境(jing)(jing)溫(wen)(wen)度(du)。通(tong)常，形(xing)成測溫(wen)(wen)單(dan)元還包(bao)括(kuo)鈍(dun)化(hua)步(bu)驟，即，步(bu)驟s：在(zai)金(jin)(jin)屬(shu)層(ceng)(ceng)(ceng)上(shang)形(xing)成鈍(dun)化(hua)層(ceng)(ceng)(ceng)，并在(zai)鈍(dun)化(hua)層(ceng)(ceng)(ceng)上(shang)對應溫(wen)(wen)度(du)傳(chuan)(chuan)感(gan)(gan)器(qi)引出輸出端(duan)(duan)子(zi)處(chu)設有(you)通(tong)孔。因上(shang)述熱電(dian)偶傳(chuan)(chuan)感(gan)(gan)器(qi)中上(shang)層(ceng)(ceng)(ceng)有(you)金(jin)(jin)屬(shu)結(jie)構(gou)如金(jin)(jin)屬(shu)鋁層(ceng)(ceng)(ceng)，對于(yu)直(zhi)接暴露(lu)在(zai)空氣(qi)中時(shi)容(rong)易(yi)(yi)氧化(hua)的(de)金(jin)(jin)屬(shu)層(ceng)(ceng)(ceng)，其上(shang)還形(xing)成一(yi)層(ceng)(ceng)(ceng)鈍(dun)化(hua)層(ceng)(ceng)(ceng)，可對金(jin)(jin)屬(shu)結(jie)構(gou)進行(xing)保護。同時(shi)。買溫(wen)(wen)度(du)傳(chuan)(chuan)感(gan)(gan)器(qi)，認(ren)準深圳美信(xin)(xin)美科(ke)技有(you)限公(gong)司(si)。

利用金(jin)(jin)屬(shu)(shu)鉑在(zai)(zai)溫(wen)(wen)(wen)(wen)(wen)度(du)(du)變(bian)化(hua)(hua)(hua)(hua)時(shi)(shi)(shi)自身電(dian)(dian)(dian)(dian)阻(zu)值(zhi)也會隨(sui)著溫(wen)(wen)(wen)(wen)(wen)度(du)(du)改(gai)變(bian)的(de)(de)(de)(de)特性(xing)來測量溫(wen)(wen)(wen)(wen)(wen)度(du)(du)，溫(wen)(wen)(wen)(wen)(wen)度(du)(du)傳(chuan)(chuan)(chuan)感(gan)(gan)器(qi)的(de)(de)(de)(de)輸(shu)出(chu)(chu)(chu)端(duan)(duan)子(zi)(zi)與顯(xian)(xian)示(shi)儀(yi)(yi)表連接(jie)，顯(xian)(xian)示(shi)儀(yi)(yi)表會顯(xian)(xian)示(shi)受溫(wen)(wen)(wen)(wen)(wen)度(du)(du)影響得(de)到的(de)(de)(de)(de)鉑電(dian)(dian)(dian)(dian)阻(zu)對(dui)(dui)應的(de)(de)(de)(de)溫(wen)(wen)(wen)(wen)(wen)度(du)(du)值(zhi)。通(tong)常，形成(cheng)(cheng)(cheng)(cheng)測溫(wen)(wen)(wen)(wen)(wen)單元(yuan)(yuan)還包括鈍(dun)化(hua)(hua)(hua)(hua)步(bu)驟(zou)(zou)，即，步(bu)驟(zou)(zou)s133：在(zai)(zai)金(jin)(jin)屬(shu)(shu)層(ceng)(ceng)(ceng)(ceng)上(shang)形成(cheng)(cheng)(cheng)(cheng)鈍(dun)化(hua)(hua)(hua)(hua)層(ceng)(ceng)(ceng)(ceng)，并(bing)在(zai)(zai)鈍(dun)化(hua)(hua)(hua)(hua)層(ceng)(ceng)(ceng)(ceng)上(shang)對(dui)(dui)應所述(shu)溫(wen)(wen)(wen)(wen)(wen)度(du)(du)傳(chuan)(chuan)(chuan)感(gan)(gan)器(qi)引出(chu)(chu)(chu)輸(shu)出(chu)(chu)(chu)端(duan)(duan)子(zi)(zi)處(chu)設(she)(she)有(you)通(tong)孔。因上(shang)述(shu)熱電(dian)(dian)(dian)(dian)阻(zu)傳(chuan)(chuan)(chuan)感(gan)(gan)器(qi)中上(shang)層(ceng)(ceng)(ceng)(ceng)有(you)金(jin)(jin)屬(shu)(shu)結(jie)構如金(jin)(jin)屬(shu)(shu)鋁和(he)(he)金(jin)(jin)屬(shu)(shu)鉑，對(dui)(dui)于直接(jie)暴露在(zai)(zai)空氣中時(shi)(shi)(shi)容(rong)易(yi)氧(yang)(yang)化(hua)(hua)(hua)(hua)的(de)(de)(de)(de)金(jin)(jin)屬(shu)(shu)層(ceng)(ceng)(ceng)(ceng)，其(qi)上(shang)還形成(cheng)(cheng)(cheng)(cheng)一層(ceng)(ceng)(ceng)(ceng)鈍(dun)化(hua)(hua)(hua)(hua)層(ceng)(ceng)(ceng)(ceng)，可(ke)對(dui)(dui)金(jin)(jin)屬(shu)(shu)層(ceng)(ceng)(ceng)(ceng)進行保護。同時(shi)(shi)(shi)，需(xu)要(yao)在(zai)(zai)對(dui)(dui)應溫(wen)(wen)(wen)(wen)(wen)度(du)(du)傳(chuan)(chuan)(chuan)感(gan)(gan)器(qi)引出(chu)(chu)(chu)端(duan)(duan)子(zi)(zi)處(chu)開設(she)(she)通(tong)孔，通(tong)過通(tong)孔可(ke)引出(chu)(chu)(chu)輸(shu)出(chu)(chu)(chu)端(duan)(duan)子(zi)(zi)。在(zai)(zai)本(ben)實施(shi)例中，是在(zai)(zai)兩端(duan)(duan)的(de)(de)(de)(de)金(jin)(jin)屬(shu)(shu)鋁上(shang)方(fang)的(de)(de)(de)(de)鈍(dun)化(hua)(hua)(hua)(hua)層(ceng)(ceng)(ceng)(ceng)開設(she)(she)通(tong)孔。鈍(dun)化(hua)(hua)(hua)(hua)層(ceng)(ceng)(ceng)(ceng)可(ke)為(wei)(wei)氧(yang)(yang)化(hua)(hua)(hua)(hua)硅(gui)(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)或氮(dan)化(hua)(hua)(hua)(hua)硅(gui)(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)，也可(ke)為(wei)(wei)疊設(she)(she)的(de)(de)(de)(de)氧(yang)(yang)化(hua)(hua)(hua)(hua)硅(gui)(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)和(he)(he)氮(dan)化(hua)(hua)(hua)(hua)硅(gui)(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)。在(zai)(zai)一實施(shi)例中，測溫(wen)(wen)(wen)(wen)(wen)單元(yuan)(yuan)為(wei)(wei)一熱電(dian)(dian)(dian)(dian)偶(ou)傳(chuan)(chuan)(chuan)感(gan)(gan)結(jie)構，其(qi)具體形成(cheng)(cheng)(cheng)(cheng)過程為(wei)(wei)：步(bu)驟(zou)(zou)s134：在(zai)(zai)所述(shu)氧(yang)(yang)化(hua)(hua)(hua)(hua)硅(gui)(gui)(gui)(gui)(gui)薄膜上(shang)淀積一層(ceng)(ceng)(ceng)(ceng)多晶硅(gui)(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)，所述(shu)多晶硅(gui)(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)包括并(bing)排且(qie)間隔設(she)(she)置(zhi)的(de)(de)(de)(de)n型(xing)多晶硅(gui)(gui)(gui)(gui)(gui)條和(he)(he)p型(xing)多晶硅(gui)(gui)(gui)(gui)(gui)條。如圖5和(he)(he)圖6所示(shi)，在(zai)(zai)氧(yang)(yang)化(hua)(hua)(hua)(hua)硅(gui)(gui)(gui)(gui)(gui)薄膜23上(shang)淀積一層(ceng)(ceng)(ceng)(ceng)多晶硅(gui)(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)50，該多晶硅(gui)(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)50包括并(bing)排且(qie)間隔設(she)(she)置(zhi)的(de)(de)(de)(de)n型(xing)多晶硅(gui)(gui)(gui)(gui)(gui)條51和(he)(he)p型(xing)多晶硅(gui)(gui)(gui)(gui)(gui)條52。n型(xing)多晶硅(gui)(gui)(gui)(gui)(gui)可(ke)為(wei)(wei)在(zai)(zai)多晶硅(gui)(gui)(gui)(gui)(gui)內部摻(chan)雜ⅴ族元(yuan)(yuan)素形成(cheng)(cheng)(cheng)(cheng)導電(dian)(dian)(dian)(dian)類型(xing)為(wei)(wei)n型(xing)的(de)(de)(de)(de)多晶硅(gui)(gui)(gui)(gui)(gui)，且(qie)其(qi)內部摻(chan)雜均勻。溫(wen)(wen)(wen)(wen)(wen)度(du)(du)傳(chuan)(chuan)(chuan)感(gan)(gan)器(qi)現貨廠家(jia)，美信美科技就是牛。珠海雙極型(xing)溫(wen)(wen)(wen)(wen)(wen)度(du)(du)傳(chuan)(chuan)(chuan)感(gan)(gan)器(qi)精度(du)(du)哪家(jia)好

深圳美信美溫(wen)度(du)傳感器價格好。武(wu)漢(han)紅外(wai) 溫(wen)度(du)傳感器工(gong)藝

如圖c所示(shi)(shi)(shi)，基(ji)(ji)底包括硅(gui)片和(he)氧(yang)化(hua)硅(gui)薄膜(mo)，硅(gui)片和(he)氧(yang)化(hua)硅(gui)薄膜(mo)之間形(xing)成(cheng)有(you)(you)空腔。測溫(wen)(wen)(wen)單(dan)元(yuan)是溫(wen)(wen)(wen)度(du)(du)傳(chuan)感(gan)(gan)器(qi)(qi)(qi)的工(gong)(gong)作單(dan)元(yuan)，溫(wen)(wen)(wen)度(du)(du)傳(chuan)感(gan)(gan)器(qi)(qi)(qi)通過該(gai)測溫(wen)(wen)(wen)單(dan)元(yuan)感(gan)(gan)知溫(wen)(wen)(wen)度(du)(du)后形(xing)成(cheng)電信號并輸出(chu)，在(zai)本方案中，測溫(wen)(wen)(wen)單(dan)元(yuan)形(xing)成(cheng)于氧(yang)化(hua)硅(gui)薄膜(mo)上(shang)且位于空腔上(shang)方。在(zai)一(yi)實施(shi)例(li)中，測溫(wen)(wen)(wen)單(dan)元(yuan)為(wei)一(yi)熱電阻傳(chuan)感(gan)(gan)結構(gou)，包括：金(jin)(jin)(jin)屬(shu)(shu)(shu)層(ceng)(ceng)(ceng)，金(jin)(jin)(jin)屬(shu)(shu)(shu)層(ceng)(ceng)(ceng)為(wei)金(jin)(jin)(jin)屬(shu)(shu)(shu)鉑層(ceng)(ceng)(ceng)，金(jin)(jin)(jin)屬(shu)(shu)(shu)鉑層(ceng)(ceng)(ceng)呈連續弓字(zi)(zi)形(xing)結構(gou)；和(he)第二(er)金(jin)(jin)(jin)屬(shu)(shu)(shu)層(ceng)(ceng)(ceng)，位于金(jin)(jin)(jin)屬(shu)(shu)(shu)鉑層(ceng)(ceng)(ceng)外(wai)側兩端，用于引出(chu)溫(wen)(wen)(wen)度(du)(du)傳(chuan)感(gan)(gan)器(qi)(qi)(qi)的輸出(chu)端子。如圖和(he)圖所示(shi)(shi)(shi)，氧(yang)化(hua)硅(gui)薄膜(mo)上(shang)淀積有(you)(you)一(yi)層(ceng)(ceng)(ceng)金(jin)(jin)(jin)屬(shu)(shu)(shu)層(ceng)(ceng)(ceng)，該(gai)金(jin)(jin)(jin)屬(shu)(shu)(shu)層(ceng)(ceng)(ceng)為(wei)金(jin)(jin)(jin)屬(shu)(shu)(shu)鉑層(ceng)(ceng)(ceng)，即熱電阻傳(chuan)感(gan)(gan)結構(gou)選用鉑熱電阻。在(zai)另一(yi)實施(shi)例(li)中，也(ye)可(ke)選用其他(ta)電阻溫(wen)(wen)(wen)度(du)(du)系數(shu)較高的材料如鎳、鐵(tie)等(deng)。為(wei)減小(xiao)溫(wen)(wen)(wen)度(du)(du)傳(chuan)感(gan)(gan)器(qi)(qi)(qi)的尺(chi)寸(cun)，在(zai)小(xiao)尺(chi)寸(cun)的基(ji)(ji)底上(shang)增(zeng)大鉑熱電阻的接觸面積，鉑熱電阻呈連續弓字(zi)(zi)形(xing)結構(gou)(如圖所示(shi)(shi)(shi))。金(jin)(jin)(jin)屬(shu)(shu)(shu)鉑層(ceng)(ceng)(ceng)外(wai)側兩端淀積有(you)(you)一(yi)層(ceng)(ceng)(ceng)第二(er)金(jin)(jin)(jin)屬(shu)(shu)(shu)層(ceng)(ceng)(ceng)。深圳市美(mei)信美(mei)科(ke)技有(you)(you)限公(gong)司(si)于2020年04月17日(ri)成(cheng)立。公(gong)司(si)經營范(fan)圍包括：一(yi)般經營項目是：電子產品及其配件的技術開發與銷售；國內貿易等(deng)。本公(gong)司(si)主營推廣銷售AD（亞(ya)德(de)諾(nuo)）,LINEAR（凌特）以及TI、MAXIM、NXP等(deng)國際有(you)(you)名(ming)品牌集成(cheng)電路。產品廣泛(fan)應用于：汽車、通信、消費電子、工(gong)(gong)業控(kong)制(zhi)、醫療器(qi)(qi)(qi)械、儀器(qi)(qi)(qi)儀表、安(an)防(fang)監控(kong)等(deng)領(ling)域。該(gai)第二(er)金(jin)(jin)(jin)屬(shu)(shu)(shu)層(ceng)(ceng)(ceng)可(ke)為(wei)金(jin)(jin)(jin)屬(shu)(shu)(shu)鋁層(ceng)(ceng)(ceng)。武(wu)漢紅外(wai) 溫(wen)(wen)(wen)度(du)(du)傳(chuan)感(gan)(gan)器(qi)(qi)(qi)工(gong)(gong)藝

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