即溫(wen)(wen)(wen)度傳感器(qi)(qi)(qi)(qi)(qi)的(de)(de)(de)輸(shu)出(chu)導線與(yu)鋁(lv)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)連(lian)接以通(tong)(tong)過(guo)(guo)鋁(lv)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)與(yu)金(jin)(jin)(jin)(jin)屬(shu)(shu)(shu)(shu)(shu)(shu)鉑(bo)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)連(lian)接。上(shang)(shang)(shang)述鉑(bo)熱(re)電(dian)阻(zu)傳感器(qi)(qi)(qi)(qi)(qi)，利用(yong)金(jin)(jin)(jin)(jin)屬(shu)(shu)(shu)(shu)(shu)(shu)鉑(bo)在(zai)(zai)溫(wen)(wen)(wen)度變化(hua)時自身電(dian)阻(zu)值也會隨著溫(wen)(wen)(wen)度改(gai)變的(de)(de)(de)特性來(lai)測量溫(wen)(wen)(wen)度，溫(wen)(wen)(wen)度傳感器(qi)(qi)(qi)(qi)(qi)的(de)(de)(de)輸(shu)出(chu)端(duan)子與(yu)顯(xian)(xian)(xian)示儀(yi)表(biao)連(lian)接，顯(xian)(xian)(xian)示儀(yi)表(biao)會顯(xian)(xian)(xian)示受(shou)溫(wen)(wen)(wen)度影響(xiang)得到(dao)的(de)(de)(de)鉑(bo)電(dian)阻(zu)對(dui)應的(de)(de)(de)溫(wen)(wen)(wen)度值。在(zai)(zai)一實施(shi)例中(zhong)(zhong)，因上(shang)(shang)(shang)述熱(re)電(dian)阻(zu)傳感器(qi)(qi)(qi)(qi)(qi)中(zhong)(zhong)上(shang)(shang)(shang)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)有(you)金(jin)(jin)(jin)(jin)屬(shu)(shu)(shu)(shu)(shu)(shu)結(jie)(jie)構(gou)如(ru)金(jin)(jin)(jin)(jin)屬(shu)(shu)(shu)(shu)(shu)(shu)鋁(lv)和(he)(he)(he)金(jin)(jin)(jin)(jin)屬(shu)(shu)(shu)(shu)(shu)(shu)鉑(bo)，對(dui)于(yu)(yu)直接暴露在(zai)(zai)空氣中(zhong)(zhong)時容易氧(yang)化(hua)的(de)(de)(de)金(jin)(jin)(jin)(jin)屬(shu)(shu)(shu)(shu)(shu)(shu)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)，其上(shang)(shang)(shang)還(huan)(huan)形成有(you)一層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)鈍(dun)化(hua)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)，可對(dui)金(jin)(jin)(jin)(jin)屬(shu)(shu)(shu)(shu)(shu)(shu)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)進行(xing)保護。同時，需要(yao)在(zai)(zai)對(dui)應溫(wen)(wen)(wen)度傳感器(qi)(qi)(qi)(qi)(qi)引出(chu)端(duan)子處開(kai)(kai)設(she)有(you)通(tong)(tong)孔，通(tong)(tong)過(guo)(guo)通(tong)(tong)孔可引出(chu)輸(shu)出(chu)端(duan)子。在(zai)(zai)本實施(shi)例中(zhong)(zhong)，是在(zai)(zai)兩端(duan)的(de)(de)(de)金(jin)(jin)(jin)(jin)屬(shu)(shu)(shu)(shu)(shu)(shu)鋁(lv)上(shang)(shang)(shang)方的(de)(de)(de)鈍(dun)化(hua)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)開(kai)(kai)設(she)有(you)通(tong)(tong)孔。鈍(dun)化(hua)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)可為氧(yang)化(hua)硅(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)或氮(dan)化(hua)硅(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)，也可為疊(die)設(she)的(de)(de)(de)氧(yang)化(hua)硅(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)和(he)(he)(he)氮(dan)化(hua)硅(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)。在(zai)(zai)一實施(shi)例中(zhong)(zhong)，測溫(wen)(wen)(wen)單(dan)元為一熱(re)電(dian)偶傳感結(jie)(jie)構(gou)，包(bao)(bao)括(kuo)(kuo)：多晶(jing)(jing)硅(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)，包(bao)(bao)括(kuo)(kuo)并(bing)排(pai)且(qie)間(jian)隔設(she)置的(de)(de)(de)n型(xing)(xing)多晶(jing)(jing)硅(gui)(gui)(gui)條(tiao)和(he)(he)(he)p型(xing)(xing)多晶(jing)(jing)硅(gui)(gui)(gui)條(tiao)；和(he)(he)(he)第三(san)金(jin)(jin)(jin)(jin)屬(shu)(shu)(shu)(shu)(shu)(shu)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)。第三(san)金(jin)(jin)(jin)(jin)屬(shu)(shu)(shu)(shu)(shu)(shu)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)包(bao)(bao)括(kuo)(kuo)位(wei)于(yu)(yu)相(xiang)鄰多晶(jing)(jing)硅(gui)(gui)(gui)條(tiao)之(zhi)間(jian)的(de)(de)(de)金(jin)(jin)(jin)(jin)屬(shu)(shu)(shu)(shu)(shu)(shu)結(jie)(jie)構(gou)，n型(xing)(xing)多晶(jing)(jing)硅(gui)(gui)(gui)和(he)(he)(he)p型(xing)(xing)多晶(jing)(jing)硅(gui)(gui)(gui)通(tong)(tong)過(guo)(guo)金(jin)(jin)(jin)(jin)屬(shu)(shu)(shu)(shu)(shu)(shu)結(jie)(jie)構(gou)串聯，第三(san)金(jin)(jin)(jin)(jin)屬(shu)(shu)(shu)(shu)(shu)(shu)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)還(huan)(huan)包(bao)(bao)括(kuo)(kuo)位(wei)于(yu)(yu)多晶(jing)(jing)硅(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)外(wai)側(ce)兩端(duan)的(de)(de)(de)第二金(jin)(jin)(jin)(jin)屬(shu)(shu)(shu)(shu)(shu)(shu)結(jie)(jie)構(gou)，用(yong)于(yu)(yu)引出(chu)溫(wen)(wen)(wen)度傳感器(qi)(qi)(qi)(qi)(qi)的(de)(de)(de)輸(shu)出(chu)端(duan)子。如(ru)圖和(he)(he)(he)圖所(suo)示，氧(yang)化(hua)硅(gui)(gui)(gui)薄膜上(shang)(shang)(shang)形成有(you)一層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)多晶(jing)(jing)硅(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)。該多晶(jing)(jing)硅(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)包(bao)(bao)括(kuo)(kuo)并(bing)排(pai)且(qie)間(jian)隔設(she)置的(de)(de)(de)n型(xing)(xing)多晶(jing)(jing)硅(gui)(gui)(gui)條(tiao)和(he)(he)(he)p型(xing)(xing)多晶(jing)(jing)硅(gui)(gui)(gui)條(tiao)。溫(wen)(wen)(wen)度傳感器(qi)(qi)(qi)(qi)(qi)哪家(jia)服務(wu)好？認(ren)準深圳市美信(xin)美科技(ji)有(you)限(xian)公司。武漢紅外(wai) 溫(wen)(wen)(wen)度傳感器(qi)(qi)(qi)(qi)(qi)工藝

p型(xing)(xing)多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)可為(wei)在(zai)(zai)多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)內(nei)部(bu)摻(chan)雜ⅲ族元(yuan)素(su)形(xing)成導電(dian)類(lei)型(xing)(xing)為(wei)p型(xing)(xing)的(de)(de)多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)，且(qie)其內(nei)部(bu)摻(chan)雜均勻(yun)。n型(xing)(xing)多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)條(tiao)和(he)(he)(he)p型(xing)(xing)多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)條(tiao)形(xing)狀相(xiang)(xiang)同(tong)，在(zai)(zai)本(ben)方(fang)案(an)中，n型(xing)(xing)多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)條(tiao)和(he)(he)(he)p型(xing)(xing)多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)條(tiao)為(wei)長條(tiao)型(xing)(xing)，多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)條(tiao)平(ping)行設置，具有相(xiang)(xiang)同(tong)的(de)(de)間(jian)(jian)距。步驟s135：在(zai)(zai)多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)層(ceng)(ceng)(ceng)上(shang)(shang)淀(dian)(dian)積第(di)(di)三(san)金(jin)(jin)屬(shu)層(ceng)(ceng)(ceng)，第(di)(di)三(san)金(jin)(jin)屬(shu)層(ceng)(ceng)(ceng)包(bao)括(kuo)(kuo)位(wei)于相(xiang)(xiang)鄰多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)條(tiao)之(zhi)間(jian)(jian)的(de)(de)金(jin)(jin)屬(shu)結(jie)(jie)(jie)構(gou)(gou)，n型(xing)(xing)多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)條(tiao)和(he)(he)(he)p型(xing)(xing)多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)條(tiao)通過金(jin)(jin)屬(shu)結(jie)(jie)(jie)構(gou)(gou)串(chuan)(chuan)聯(lian)，第(di)(di)三(san)金(jin)(jin)屬(shu)層(ceng)(ceng)(ceng)還包(bao)括(kuo)(kuo)位(wei)于多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)層(ceng)(ceng)(ceng)外(wai)側兩(liang)端(duan)(duan)的(de)(de)第(di)(di)二(er)(er)金(jin)(jin)屬(shu)結(jie)(jie)(jie)構(gou)(gou)，用于引出(chu)(chu)溫(wen)(wen)(wen)度傳(chuan)感(gan)(gan)器(qi)的(de)(de)輸(shu)出(chu)(chu)端(duan)(duan)子。繼(ji)續參見圖5和(he)(he)(he)圖6，在(zai)(zai)多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)層(ceng)(ceng)(ceng)50上(shang)(shang)淀(dian)(dian)積第(di)(di)三(san)金(jin)(jin)屬(shu)層(ceng)(ceng)(ceng)60，第(di)(di)三(san)金(jin)(jin)屬(shu)層(ceng)(ceng)(ceng)60包(bao)括(kuo)(kuo)金(jin)(jin)屬(shu)結(jie)(jie)(jie)構(gou)(gou)61和(he)(he)(he)第(di)(di)二(er)(er)金(jin)(jin)屬(shu)結(jie)(jie)(jie)構(gou)(gou)62。金(jin)(jin)屬(shu)結(jie)(jie)(jie)構(gou)(gou)61位(wei)于相(xiang)(xiang)鄰多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)條(tiao)之(zhi)間(jian)(jian)以連(lian)接(jie)該多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)條(tiao)，具體(ti)為(wei)位(wei)于相(xiang)(xiang)鄰多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)條(tiao)端(duan)(duan)部(bu)位(wei)置，所有n型(xing)(xing)多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)條(tiao)51和(he)(he)(he)p型(xing)(xing)多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)條(tiao)52通過該金(jin)(jin)屬(shu)結(jie)(jie)(jie)構(gou)(gou)61形(xing)成一(yi)串(chuan)(chuan)聯(lian)結(jie)(jie)(jie)構(gou)(gou)，因此(ci)，當具有m個多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)條(tiao)時，需要m-1個金(jin)(jin)屬(shu)結(jie)(jie)(jie)構(gou)(gou)61使多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)條(tiao)串(chuan)(chuan)聯(lian)起來。一(yi)個n型(xing)(xing)多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)條(tiao)與一(yi)個p型(xing)(xing)多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)條(tiao)串(chuan)(chuan)聯(lian)形(xing)成一(yi)個塞貝(bei)克(seebeck)結(jie)(jie)(jie)構(gou)(gou)，在(zai)(zai)本(ben)方(fang)案(an)中，是多(duo)(duo)(duo)(duo)(duo)(duo)個塞貝(bei)克結(jie)(jie)(jie)構(gou)(gou)串(chuan)(chuan)聯(lian)形(xing)成一(yi)個測溫(wen)(wen)(wen)單元(yuan)，因此(ci)，m需為(wei)偶數。第(di)(di)二(er)(er)金(jin)(jin)屬(shu)結(jie)(jie)(jie)構(gou)(gou)62淀(dian)(dian)積于多(duo)(duo)(duo)(duo)(duo)(duo)晶(jing)(jing)(jing)(jing)(jing)硅(gui)(gui)層(ceng)(ceng)(ceng)外(wai)側的(de)(de)兩(liang)端(duan)(duan)，以便于引出(chu)(chu)溫(wen)(wen)(wen)度傳(chuan)感(gan)(gan)器(qi)的(de)(de)輸(shu)出(chu)(chu)端(duan)(duan)子。在(zai)(zai)本(ben)實(shi)施例中，第(di)(di)三(san)金(jin)(jin)屬(shu)層(ceng)(ceng)(ceng)60為(wei)金(jin)(jin)屬(shu)鋁(lv)層(ceng)(ceng)(ceng)。上(shang)(shang)述(shu)熱(re)電(dian)偶傳(chuan)感(gan)(gan)結(jie)(jie)(jie)構(gou)(gou)，利(li)用半導體(ti)兩(liang)端(duan)(duan)的(de)(de)溫(wen)(wen)(wen)度不同(tong)時。上(shang)(shang)海NTC溫(wen)(wen)(wen)度傳(chuan)感(gan)(gan)器(qi)報(bao)價(jia)進口的(de)(de)德州溫(wen)(wen)(wen)度傳(chuan)感(gan)(gan)器(qi)，就找深圳(zhen)美信美科技。

上(shang)述溫(wen)(wen)(wen)(wen)度(du)(du)(du)傳(chuan)(chuan)感(gan)(gan)(gan)(gan)(gan)器(qi)制(zhi)(zhi)(zhi)備(bei)方(fang)法(fa)，可以(yi)得到氧(yang)(yang)化(hua)硅(gui)(gui)(gui)薄(bo)(bo)膜(mo)(mo)，且氧(yang)(yang)化(hua)硅(gui)(gui)(gui)薄(bo)(bo)膜(mo)(mo)與硅(gui)(gui)(gui)通過空(kong)腔隔離(li)，空(kong)腔下方(fang)的(de)(de)(de)硅(gui)(gui)(gui)不會影(ying)響上(shang)方(fang)氧(yang)(yang)化(hua)硅(gui)(gui)(gui)薄(bo)(bo)膜(mo)(mo)的(de)(de)(de)隔離(li)效果，因此(ci)無需通過深槽(cao)刻(ke)蝕(shi)工藝將(jiang)(jiang)多(duo)余的(de)(de)(de)硅(gui)(gui)(gui)刻(ke)蝕(shi)掉，簡化(hua)了制(zhi)(zhi)(zhi)備(bei)過程，節約制(zhi)(zhi)(zhi)備(bei)時間(jian)，節省了制(zhi)(zhi)(zhi)備(bei)成本。由于氧(yang)(yang)化(hua)硅(gui)(gui)(gui)薄(bo)(bo)膜(mo)(mo)導熱(re)率低(di)，將(jiang)(jiang)測(ce)(ce)(ce)(ce)(ce)溫(wen)(wen)(wen)(wen)單(dan)(dan)(dan)(dan)元(yuan)(yuan)制(zhi)(zhi)(zhi)備(bei)在氧(yang)(yang)化(hua)硅(gui)(gui)(gui)薄(bo)(bo)膜(mo)(mo)上(shang)，具有(you)(you)較(jiao)好的(de)(de)(de)測(ce)(ce)(ce)(ce)(ce)溫(wen)(wen)(wen)(wen)效果，使溫(wen)(wen)(wen)(wen)度(du)(du)(du)傳(chuan)(chuan)感(gan)(gan)(gan)(gan)(gan)器(qi)性能更加穩定(ding)。本發(fa)明還涉及一種溫(wen)(wen)(wen)(wen)度(du)(du)(du)傳(chuan)(chuan)感(gan)(gan)(gan)(gan)(gan)器(qi)，包括：基底，基底包括硅(gui)(gui)(gui)片(pian)(pian)和(he)在硅(gui)(gui)(gui)片(pian)(pian)上(shang)形(xing)成的(de)(de)(de)氧(yang)(yang)化(hua)硅(gui)(gui)(gui)薄(bo)(bo)膜(mo)(mo)，硅(gui)(gui)(gui)片(pian)(pian)和(he)氧(yang)(yang)化(hua)硅(gui)(gui)(gui)薄(bo)(bo)膜(mo)(mo)之(zhi)間(jian)形(xing)成有(you)(you)空(kong)腔；和(he)測(ce)(ce)(ce)(ce)(ce)溫(wen)(wen)(wen)(wen)單(dan)(dan)(dan)(dan)元(yuan)(yuan)，測(ce)(ce)(ce)(ce)(ce)溫(wen)(wen)(wen)(wen)單(dan)(dan)(dan)(dan)元(yuan)(yuan)形(xing)成于所(suo)述空(kong)腔上(shang)方(fang)的(de)(de)(de)氧(yang)(yang)化(hua)硅(gui)(gui)(gui)薄(bo)(bo)膜(mo)(mo)上(shang)，所(suo)述測(ce)(ce)(ce)(ce)(ce)溫(wen)(wen)(wen)(wen)單(dan)(dan)(dan)(dan)元(yuan)(yuan)用于感(gan)(gan)(gan)(gan)(gan)測(ce)(ce)(ce)(ce)(ce)環境溫(wen)(wen)(wen)(wen)度(du)(du)(du)。如(ru)圖(tu)(tu)2c所(suo)示(shi)，基底包括硅(gui)(gui)(gui)片(pian)(pian)20和(he)氧(yang)(yang)化(hua)硅(gui)(gui)(gui)薄(bo)(bo)膜(mo)(mo)23，硅(gui)(gui)(gui)片(pian)(pian)20和(he)氧(yang)(yang)化(hua)硅(gui)(gui)(gui)薄(bo)(bo)膜(mo)(mo)之(zhi)間(jian)形(xing)成有(you)(you)空(kong)腔22。測(ce)(ce)(ce)(ce)(ce)溫(wen)(wen)(wen)(wen)單(dan)(dan)(dan)(dan)元(yuan)(yuan)是溫(wen)(wen)(wen)(wen)度(du)(du)(du)傳(chuan)(chuan)感(gan)(gan)(gan)(gan)(gan)器(qi)的(de)(de)(de)工作單(dan)(dan)(dan)(dan)元(yuan)(yuan)，溫(wen)(wen)(wen)(wen)度(du)(du)(du)傳(chuan)(chuan)感(gan)(gan)(gan)(gan)(gan)器(qi)通過該(gai)測(ce)(ce)(ce)(ce)(ce)溫(wen)(wen)(wen)(wen)單(dan)(dan)(dan)(dan)元(yuan)(yuan)感(gan)(gan)(gan)(gan)(gan)知溫(wen)(wen)(wen)(wen)度(du)(du)(du)后形(xing)成電(dian)(dian)信(xin)號并輸出，在本方(fang)案中，測(ce)(ce)(ce)(ce)(ce)溫(wen)(wen)(wen)(wen)單(dan)(dan)(dan)(dan)元(yuan)(yuan)形(xing)成于氧(yang)(yang)化(hua)硅(gui)(gui)(gui)薄(bo)(bo)膜(mo)(mo)23上(shang)且位于空(kong)腔上(shang)方(fang)。在一實(shi)施例中，測(ce)(ce)(ce)(ce)(ce)溫(wen)(wen)(wen)(wen)單(dan)(dan)(dan)(dan)元(yuan)(yuan)為(wei)一熱(re)電(dian)(dian)阻傳(chuan)(chuan)感(gan)(gan)(gan)(gan)(gan)結(jie)(jie)構，包括：金(jin)(jin)屬(shu)(shu)(shu)層(ceng)(ceng)(ceng)，金(jin)(jin)屬(shu)(shu)(shu)層(ceng)(ceng)(ceng)為(wei)金(jin)(jin)屬(shu)(shu)(shu)鉑層(ceng)(ceng)(ceng)，金(jin)(jin)屬(shu)(shu)(shu)鉑層(ceng)(ceng)(ceng)呈連續弓(gong)字形(xing)結(jie)(jie)構；和(he)第二金(jin)(jin)屬(shu)(shu)(shu)層(ceng)(ceng)(ceng)，位于金(jin)(jin)屬(shu)(shu)(shu)鉑層(ceng)(ceng)(ceng)外側兩端(duan)，用于引出溫(wen)(wen)(wen)(wen)度(du)(du)(du)傳(chuan)(chuan)感(gan)(gan)(gan)(gan)(gan)器(qi)的(de)(de)(de)輸出端(duan)子。如(ru)圖(tu)(tu)3和(he)圖(tu)(tu)4所(suo)示(shi)，氧(yang)(yang)化(hua)硅(gui)(gui)(gui)薄(bo)(bo)膜(mo)(mo)23上(shang)淀積有(you)(you)一層(ceng)(ceng)(ceng)金(jin)(jin)屬(shu)(shu)(shu)層(ceng)(ceng)(ceng)30，該(gai)金(jin)(jin)屬(shu)(shu)(shu)層(ceng)(ceng)(ceng)30為(wei)金(jin)(jin)屬(shu)(shu)(shu)鉑層(ceng)(ceng)(ceng)，即熱(re)電(dian)(dian)阻傳(chuan)(chuan)感(gan)(gan)(gan)(gan)(gan)結(jie)(jie)構選(xuan)用鉑熱(re)電(dian)(dian)阻。

在一實施(shi)例中。深圳市(shi)美(mei)信美(mei)科技(ji)(ji)有(you)限公(gong)司于(yu)2020年04月(yue)17日成立。公(gong)司經營(ying)范(fan)圍包括(kuo)：一般經營(ying)項目是(shi)：電(dian)子(zi)產品及其配件的技(ji)(ji)術開發與(yu)(yu)銷售(shou)；國內貿易(yi)等。本(ben)公(gong)司主(zhu)營(ying)推廣銷售(shou)AD（亞德(de)諾）,LINEAR（凌特）以(yi)及TI、MAXIM、NXP等國際(ji)品牌集(ji)成電(dian)路。產品廣泛應用于(yu)：汽車、通(tong)信、消費電(dian)子(zi)、工(gong)業控(kong)制、醫療器(qi)械(xie)、儀器(qi)儀表、安(an)防(fang)監控(kong)等領(ling)域(yu)。本(ben)公(gong)司一直秉承優(you)(you)勢(shi)(shi)服(fu)務(wu)，誠信合作(zuo)的原則。以(yi)現代化管理以(yi)及優(you)(you)勢(shi)(shi)的渠道價格、良好的信譽與(yu)(yu)廣大(da)(da)客戶建(jian)立了長期(qi)友好的合作(zuo)關系(xi)，為(wei)廣大(da)(da)廠商和(he)市(shi)場客戶提供優(you)(you)勢(shi)(shi)的產品服(fu)務(wu)。可(ke)(ke)以(yi)將溫(wen)度傳感器(qi)兩輸(shu)出端(duan)子(zi)作(zuo)為(wei)冷(leng)端(duan)且保持冷(leng)端(duan)溫(wen)度恒(heng)定，將串聯的多晶硅層(ceng)(ceng)作(zuo)為(wei)熱端(duan)感測實際(ji)環境溫(wen)度，當(dang)環境溫(wen)度發生(sheng)變(bian)化時(shi)，冷(leng)端(duan)和(he)熱端(duan)的溫(wen)差發生(sheng)變(bian)化，因此冷(leng)端(duan)的電(dian)勢(shi)(shi)會發生(sheng)變(bian)化，與(yu)(yu)顯示(shi)儀表連接后，顯示(shi)儀表會顯示(shi)熱電(dian)偶受當(dang)前環境溫(wen)度影(ying)響得到的電(dian)勢(shi)(shi)所(suo)對(dui)應的熱端(duan)溫(wen)度，即當(dang)前環境溫(wen)度。通(tong)常(chang)，形(xing)成測溫(wen)單元還(huan)包括(kuo)鈍化步(bu)驟(zou)，即，步(bu)驟(zou)s：在金(jin)(jin)屬層(ceng)(ceng)上(shang)形(xing)成鈍化層(ceng)(ceng)，并在鈍化層(ceng)(ceng)上(shang)對(dui)應溫(wen)度傳感器(qi)引出輸(shu)出端(duan)子(zi)處(chu)設有(you)通(tong)孔(kong)。因上(shang)述熱電(dian)偶傳感器(qi)中上(shang)層(ceng)(ceng)有(you)金(jin)(jin)屬結(jie)構(gou)如金(jin)(jin)屬鋁層(ceng)(ceng)，對(dui)于(yu)直接暴露(lu)在空氣中時(shi)容易(yi)氧(yang)化的金(jin)(jin)屬層(ceng)(ceng)，其上(shang)還(huan)形(xing)成一層(ceng)(ceng)鈍化層(ceng)(ceng)，可(ke)(ke)對(dui)金(jin)(jin)屬結(jie)構(gou)進行保護(hu)。同時(shi)。買溫(wen)度傳感器(qi)，認準(zhun)深圳美(mei)信美(mei)科技(ji)(ji)有(you)限公(gong)司。

利(li)用(yong)金(jin)屬鉑在(zai)(zai)溫度(du)變化(hua)(hua)(hua)(hua)時(shi)自身(shen)電阻(zu)值也會(hui)隨著溫度(du)改變的(de)(de)(de)特性來測量溫度(du)，溫度(du)傳(chuan)(chuan)(chuan)感(gan)(gan)(gan)器(qi)的(de)(de)(de)輸(shu)出端子與(yu)顯示儀表(biao)連接(jie)(jie)，顯示儀表(biao)會(hui)顯示受溫度(du)影響(xiang)得(de)到的(de)(de)(de)鉑電阻(zu)對應的(de)(de)(de)溫度(du)值。通(tong)(tong)常，形(xing)成(cheng)(cheng)測溫單(dan)元(yuan)還包括鈍化(hua)(hua)(hua)(hua)步驟(zou)(zou)，即，步驟(zou)(zou)s133：在(zai)(zai)金(jin)屬層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)上(shang)(shang)形(xing)成(cheng)(cheng)鈍化(hua)(hua)(hua)(hua)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)，并(bing)在(zai)(zai)鈍化(hua)(hua)(hua)(hua)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)上(shang)(shang)對應所述(shu)溫度(du)傳(chuan)(chuan)(chuan)感(gan)(gan)(gan)器(qi)引出輸(shu)出端子處設(she)(she)有通(tong)(tong)孔(kong)。因(yin)上(shang)(shang)述(shu)熱(re)電阻(zu)傳(chuan)(chuan)(chuan)感(gan)(gan)(gan)器(qi)中上(shang)(shang)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)有金(jin)屬結構如金(jin)屬鋁和(he)(he)金(jin)屬鉑，對于直(zhi)接(jie)(jie)暴(bao)露在(zai)(zai)空氣中時(shi)容易氧化(hua)(hua)(hua)(hua)的(de)(de)(de)金(jin)屬層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)，其(qi)上(shang)(shang)還形(xing)成(cheng)(cheng)一(yi)(yi)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)鈍化(hua)(hua)(hua)(hua)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)，可(ke)對金(jin)屬層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)進行保護。同時(shi)，需(xu)要在(zai)(zai)對應溫度(du)傳(chuan)(chuan)(chuan)感(gan)(gan)(gan)器(qi)引出端子處開設(she)(she)通(tong)(tong)孔(kong)，通(tong)(tong)過(guo)通(tong)(tong)孔(kong)可(ke)引出輸(shu)出端子。在(zai)(zai)本實(shi)施(shi)例(li)中，是(shi)(shi)在(zai)(zai)兩端的(de)(de)(de)金(jin)屬鋁上(shang)(shang)方的(de)(de)(de)鈍化(hua)(hua)(hua)(hua)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)開設(she)(she)通(tong)(tong)孔(kong)。鈍化(hua)(hua)(hua)(hua)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)可(ke)為(wei)氧化(hua)(hua)(hua)(hua)硅(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)或氮(dan)化(hua)(hua)(hua)(hua)硅(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)，也可(ke)為(wei)疊設(she)(she)的(de)(de)(de)氧化(hua)(hua)(hua)(hua)硅(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)和(he)(he)氮(dan)化(hua)(hua)(hua)(hua)硅(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)。在(zai)(zai)一(yi)(yi)實(shi)施(shi)例(li)中，測溫單(dan)元(yuan)為(wei)一(yi)(yi)熱(re)電偶傳(chuan)(chuan)(chuan)感(gan)(gan)(gan)結構，其(qi)具體形(xing)成(cheng)(cheng)過(guo)程為(wei)：步驟(zou)(zou)s134：在(zai)(zai)所述(shu)氧化(hua)(hua)(hua)(hua)硅(gui)(gui)(gui)(gui)薄膜上(shang)(shang)淀積(ji)一(yi)(yi)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)多晶(jing)(jing)硅(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)，所述(shu)多晶(jing)(jing)硅(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)包括并(bing)排且(qie)間隔設(she)(she)置的(de)(de)(de)n型(xing)(xing)多晶(jing)(jing)硅(gui)(gui)(gui)(gui)條和(he)(he)p型(xing)(xing)多晶(jing)(jing)硅(gui)(gui)(gui)(gui)條。如圖5和(he)(he)圖6所示，在(zai)(zai)氧化(hua)(hua)(hua)(hua)硅(gui)(gui)(gui)(gui)薄膜23上(shang)(shang)淀積(ji)一(yi)(yi)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)多晶(jing)(jing)硅(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)50，該多晶(jing)(jing)硅(gui)(gui)(gui)(gui)層(ceng)(ceng)(ceng)(ceng)(ceng)(ceng)50包括并(bing)排且(qie)間隔設(she)(she)置的(de)(de)(de)n型(xing)(xing)多晶(jing)(jing)硅(gui)(gui)(gui)(gui)條51和(he)(he)p型(xing)(xing)多晶(jing)(jing)硅(gui)(gui)(gui)(gui)條52。n型(xing)(xing)多晶(jing)(jing)硅(gui)(gui)(gui)(gui)可(ke)為(wei)在(zai)(zai)多晶(jing)(jing)硅(gui)(gui)(gui)(gui)內部摻雜(za)ⅴ族元(yuan)素形(xing)成(cheng)(cheng)導電類(lei)型(xing)(xing)為(wei)n型(xing)(xing)的(de)(de)(de)多晶(jing)(jing)硅(gui)(gui)(gui)(gui)，且(qie)其(qi)內部摻雜(za)均勻。溫度(du)傳(chuan)(chuan)(chuan)感(gan)(gan)(gan)器(qi)現貨廠家，美信美科(ke)技就是(shi)(shi)牛。珠海雙(shuang)極型(xing)(xing)溫度(du)傳(chuan)(chuan)(chuan)感(gan)(gan)(gan)器(qi)精度(du)哪家好(hao)

深圳美信美溫度傳感器(qi)價格好(hao)。武漢紅外(wai) 溫度傳感器(qi)工藝

如圖(tu)(tu)c所(suo)(suo)(suo)示，基底(di)包括硅(gui)片(pian)和(he)氧化(hua)(hua)硅(gui)薄(bo)(bo)膜，硅(gui)片(pian)和(he)氧化(hua)(hua)硅(gui)薄(bo)(bo)膜之間形(xing)成(cheng)(cheng)有(you)(you)(you)空腔。測溫(wen)(wen)(wen)(wen)單元(yuan)(yuan)是溫(wen)(wen)(wen)(wen)度(du)傳(chuan)(chuan)(chuan)感器(qi)(qi)的(de)工(gong)作單元(yuan)(yuan)，溫(wen)(wen)(wen)(wen)度(du)傳(chuan)(chuan)(chuan)感器(qi)(qi)通過該(gai)測溫(wen)(wen)(wen)(wen)單元(yuan)(yuan)感知(zhi)溫(wen)(wen)(wen)(wen)度(du)后形(xing)成(cheng)(cheng)電(dian)(dian)(dian)信號并輸出(chu)，在(zai)本(ben)(ben)方案中(zhong)，測溫(wen)(wen)(wen)(wen)單元(yuan)(yuan)形(xing)成(cheng)(cheng)于(yu)(yu)(yu)氧化(hua)(hua)硅(gui)薄(bo)(bo)膜上(shang)且位于(yu)(yu)(yu)空腔上(shang)方。在(zai)一(yi)實施例中(zhong)，測溫(wen)(wen)(wen)(wen)單元(yuan)(yuan)為(wei)(wei)(wei)一(yi)熱(re)(re)(re)電(dian)(dian)(dian)阻(zu)(zu)傳(chuan)(chuan)(chuan)感結構，包括：金(jin)(jin)屬(shu)(shu)(shu)(shu)層(ceng)(ceng)，金(jin)(jin)屬(shu)(shu)(shu)(shu)層(ceng)(ceng)為(wei)(wei)(wei)金(jin)(jin)屬(shu)(shu)(shu)(shu)鉑層(ceng)(ceng)，金(jin)(jin)屬(shu)(shu)(shu)(shu)鉑層(ceng)(ceng)呈連續弓字形(xing)結構；和(he)第(di)二(er)金(jin)(jin)屬(shu)(shu)(shu)(shu)層(ceng)(ceng)，位于(yu)(yu)(yu)金(jin)(jin)屬(shu)(shu)(shu)(shu)鉑層(ceng)(ceng)外側兩(liang)端，用于(yu)(yu)(yu)引出(chu)溫(wen)(wen)(wen)(wen)度(du)傳(chuan)(chuan)(chuan)感器(qi)(qi)的(de)輸出(chu)端子(zi)。如圖(tu)(tu)和(he)圖(tu)(tu)所(suo)(suo)(suo)示，氧化(hua)(hua)硅(gui)薄(bo)(bo)膜上(shang)淀積(ji)(ji)有(you)(you)(you)一(yi)層(ceng)(ceng)金(jin)(jin)屬(shu)(shu)(shu)(shu)層(ceng)(ceng)，該(gai)金(jin)(jin)屬(shu)(shu)(shu)(shu)層(ceng)(ceng)為(wei)(wei)(wei)金(jin)(jin)屬(shu)(shu)(shu)(shu)鉑層(ceng)(ceng)，即(ji)熱(re)(re)(re)電(dian)(dian)(dian)阻(zu)(zu)傳(chuan)(chuan)(chuan)感結構選用鉑熱(re)(re)(re)電(dian)(dian)(dian)阻(zu)(zu)。在(zai)另一(yi)實施例中(zhong)，也可選用其他電(dian)(dian)(dian)阻(zu)(zu)溫(wen)(wen)(wen)(wen)度(du)系(xi)數(shu)較高的(de)材料如鎳(nie)、鐵等(deng)(deng)。為(wei)(wei)(wei)減小(xiao)溫(wen)(wen)(wen)(wen)度(du)傳(chuan)(chuan)(chuan)感器(qi)(qi)的(de)尺(chi)寸，在(zai)小(xiao)尺(chi)寸的(de)基底(di)上(shang)增大鉑熱(re)(re)(re)電(dian)(dian)(dian)阻(zu)(zu)的(de)接觸面積(ji)(ji)，鉑熱(re)(re)(re)電(dian)(dian)(dian)阻(zu)(zu)呈連續弓字形(xing)結構(如圖(tu)(tu)所(suo)(suo)(suo)示)。金(jin)(jin)屬(shu)(shu)(shu)(shu)鉑層(ceng)(ceng)外側兩(liang)端淀積(ji)(ji)有(you)(you)(you)一(yi)層(ceng)(ceng)第(di)二(er)金(jin)(jin)屬(shu)(shu)(shu)(shu)層(ceng)(ceng)。深圳市美信美科技(ji)有(you)(you)(you)限公司(si)于(yu)(yu)(yu)2020年(nian)04月(yue)17日成(cheng)(cheng)立。公司(si)經營范圍包括：一(yi)般經營項目是：電(dian)(dian)(dian)子(zi)產品及(ji)(ji)其配件(jian)的(de)技(ji)術開發與(yu)銷售(shou)(shou)；國內貿易等(deng)(deng)。本(ben)(ben)公司(si)主營推(tui)廣(guang)銷售(shou)(shou)AD（亞德(de)諾(nuo)）,LINEAR（凌(ling)特(te)）以(yi)及(ji)(ji)TI、MAXIM、NXP等(deng)(deng)國際有(you)(you)(you)名品牌集成(cheng)(cheng)電(dian)(dian)(dian)路(lu)。產品廣(guang)泛應用于(yu)(yu)(yu)：汽車、通信、消費電(dian)(dian)(dian)子(zi)、工(gong)業控制、醫療器(qi)(qi)械(xie)、儀器(qi)(qi)儀表、安(an)防監控等(deng)(deng)領域。該(gai)第(di)二(er)金(jin)(jin)屬(shu)(shu)(shu)(shu)層(ceng)(ceng)可為(wei)(wei)(wei)金(jin)(jin)屬(shu)(shu)(shu)(shu)鋁層(ceng)(ceng)。武漢紅外 溫(wen)(wen)(wen)(wen)度(du)傳(chuan)(chuan)(chuan)感器(qi)(qi)工(gong)藝

本(ben)文來自宜(yi)興市恒通風機(ji)有限公(gong)司：//vijoo.com.cn/Article/37d799955.html